Product Information
KEY TO INKO PART NUMBERS
Example [NIK][120*98*3.7]-[NC-ARF-0]-[A]-[V] A B C D E
A. LITHOGRAPHY TOOL
ASM - ASM MRS - MRS TRE - TRE CAN - Canon NIK - Nikon UT - UltratechGCA - GCA PE - Perkin-Elmer B. APPROXIMATE OUTER DIAMETER OR DIMENSIONS OF PELLICLE FRAME (L x W x H) IN MM
C. PELLICLE FILM TYPE
FILM TYPE Film Material Film thickness AR Coating TransmissionBroadband Films NC-2 nitrocellulose 2.85 ± 0.10µm none 350 -450 nm, avg.92% NC-ART-2 nitrocellulose 2.85 ± 0.10µm organic, one side 350 -450 nm, avg.94% NC-AR-2 nitrocellulose 2.85 ± 0.10µm organic, two side 350 -450 nm, avg.97%Single Wavelength NC-0 nitrocellulose 0.86 ± 0.05µm none 436 nm > 99% NC-AR-0 nitrocellulose 0.86 ± 0.05µm organic, two side 436 nm > 99% NC-ARI-0 nitrocellulose 0.86 ± 0.05µm organic, two side 365 nm > 99% DUV193 perfluoropolymer 0.80 ± 0.05µm none 193 nm > 99%Multiple Wavelength NCF-0 nitrocellulose 0.72 ± 0.05µm none 365 nm, 436 nm > 99% NC-ARF-0 nitrocellulose 0.80 ± 0.05µm organic, two side 365 nm, 436 nm > 99% NC-HTF-2 nitrocellulose 2.85 ± 0.05µm organic, two side 365 nm, 436 nm > 99% CA-ARF-0 cellulose acetate 0.80 ± 0.05µm organic, two side 365 nm, 436 nm > 99% DUV fluoropolymer 0.80 ± 0.05µm none 248 nm, 365 nm > 99% DUV193F perfluoropolymer 0.82 ± 0.05µm none 193 nm, 248 nm, 365nm > 98% D. PELLICLE BASE ADHESIVE TYPE
Adhesive Type Description (Nominal Thickness) A acrylic adhesive w/o carrier (0.25 ± 0.04 nm)
E. SPECIAL FEATURES
V - Indicates that the pellicle is vented. The vented allows the air pressure in the pellicle cavity to equalize with that of its surrounding environment.
B - Indicates that the pellicle includes a bumper ring. The bumper ring adds to the overall height of the of the pellicle, but does not add to its sand Off capability.
IA - Indicates that the inside frame wall of the pellicle is coated with an acrylic inner-wall adhesive.
Example [NIK][120*98*3.7]-[NC-ARF-0]-[A]-[V] A B C D E
A. LITHOGRAPHY TOOL
ASM - ASM MRS - MRS TRE - TRE CAN - Canon NIK - Nikon UT - UltratechGCA - GCA PE - Perkin-Elmer B. APPROXIMATE OUTER DIAMETER OR DIMENSIONS OF PELLICLE FRAME (L x W x H) IN MM
C. PELLICLE FILM TYPE
FILM TYPE Film Material Film thickness AR Coating TransmissionBroadband Films NC-2 nitrocellulose 2.85 ± 0.10µm none 350 -450 nm, avg.92% NC-ART-2 nitrocellulose 2.85 ± 0.10µm organic, one side 350 -450 nm, avg.94% NC-AR-2 nitrocellulose 2.85 ± 0.10µm organic, two side 350 -450 nm, avg.97%Single Wavelength NC-0 nitrocellulose 0.86 ± 0.05µm none 436 nm > 99% NC-AR-0 nitrocellulose 0.86 ± 0.05µm organic, two side 436 nm > 99% NC-ARI-0 nitrocellulose 0.86 ± 0.05µm organic, two side 365 nm > 99% DUV193 perfluoropolymer 0.80 ± 0.05µm none 193 nm > 99%Multiple Wavelength NCF-0 nitrocellulose 0.72 ± 0.05µm none 365 nm, 436 nm > 99% NC-ARF-0 nitrocellulose 0.80 ± 0.05µm organic, two side 365 nm, 436 nm > 99% NC-HTF-2 nitrocellulose 2.85 ± 0.05µm organic, two side 365 nm, 436 nm > 99% CA-ARF-0 cellulose acetate 0.80 ± 0.05µm organic, two side 365 nm, 436 nm > 99% DUV fluoropolymer 0.80 ± 0.05µm none 248 nm, 365 nm > 99% DUV193F perfluoropolymer 0.82 ± 0.05µm none 193 nm, 248 nm, 365nm > 98% D. PELLICLE BASE ADHESIVE TYPE
Adhesive Type Description (Nominal Thickness) A acrylic adhesive w/o carrier (0.25 ± 0.04 nm)
E. SPECIAL FEATURES
V - Indicates that the pellicle is vented. The vented allows the air pressure in the pellicle cavity to equalize with that of its surrounding environment.
B - Indicates that the pellicle includes a bumper ring. The bumper ring adds to the overall height of the of the pellicle, but does not add to its sand Off capability.
IA - Indicates that the inside frame wall of the pellicle is coated with an acrylic inner-wall adhesive.